日本 TLJ 顯影設備

Spin coat, Spray Coater, Developer
•Upto 200mm water
•Manual Semi-Auto,fully Automatic
•MEMS 3D,Si,玻璃基板
•客製化設計

       

High performance Spin Coating 
•FPD mask up to G８
•Coating Uniformity：±１％
          


Slit Coater
•Coater：FPD Glass up to G８
•Film coating,FPD Line

          

Hot Baking/ Chiller plate
•高精度：±0.３℃
•VCD設備